Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11526085 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Bastiaan Onne Fagginger Auer, Davit Harutyunyan, Patrick Warnaar | 2022-12-13 |
| 11466980 | Metrology method and apparatus, lithographic system, device manufacturing method and substrate | Maurits Van Der Schaar, Kaustuve Bhattacharyya | 2022-10-11 |
| 11428521 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Maurits Van Der Schaar, Arie Jeffrey Den Boef +7 more | 2022-08-30 |
| 11392043 | Method and metrology apparatus for determining estimated scattered radiation intensity | Seyed Iman Mossavat, Remco Dirks | 2022-07-19 |