Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11429763 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Markus Gerardus Martinus Maria Van Kraaij, Maxim PISARENCO | 2022-08-30 |
| 11392043 | Method and metrology apparatus for determining estimated scattered radiation intensity | Seyed Iman Mossavat, Hendrik Jan Hidde Smilde | 2022-07-19 |