Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525786 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2022-12-13 |
| 11429763 | Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method | Remco Dirks, Maxim PISARENCO | 2022-08-30 |
| 11347151 | Methods and apparatus for calculating electromagnetic scattering properties of a structure | Maxim PISARENCO, Richard Quintanilha | 2022-05-31 |