Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11392043 | Method and metrology apparatus for determining estimated scattered radiation intensity | Remco Dirks, Hendrik Jan Hidde Smilde | 2022-07-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11392043 | Method and metrology apparatus for determining estimated scattered radiation intensity | Remco Dirks, Hendrik Jan Hidde Smilde | 2022-07-19 |