Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493851 | Lithographic method and lithographic apparatus | Xing Lan Liu, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2022-11-08 |
| 11442366 | Device manufacturing methods | Rizvi Rahman, Cédric Désiré Grouwstra | 2022-09-13 |
| 11392044 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Chi-Hsiang Fan +3 more | 2022-07-19 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2022-05-10 |
| 11300886 | Method of adapting feed-forward parameters | Hadi YAGUBIZADE, Ahmet Koray Erdamar | 2022-04-12 |