Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11525786 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Arno Jan Bleeker, Youri Johannes Laurentius Maria Van Dommelen, Mircea Dusa, Antoine Gaston Marie Kiers +4 more | 2022-12-13 |
| 11520238 | Optimizing an apparatus for multi-stage processing of product units | Jelle Nije, Alexander Ypma, Dimitra GKOROU, Georgios TSIROGIANNIS, Robert Jan Van Wijk +3 more | 2022-12-06 |
| 11448973 | Computational metrology based correction and control | Manouk RIJPSTRA, Cornelis Johannes Henricus LAMBREGTS, Wim Tjibbo Tel, Sarathi ROY, Chi-Fei NIEN +3 more | 2022-09-20 |
| 11442366 | Device manufacturing methods | Rizvi Rahman, Hakki Ergün Cekli | 2022-09-13 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2022-05-10 |