Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11300888 | Methods of determining stress in a substrate, control system for controlling a lithographic process, lithographic apparatus and computer program product | Richard Johannes Franciscus Van Haren, Leon Paul VAN DIJK, Ilya MALAKHOVSKY | 2022-04-12 |
| 11300889 | Metrology apparatus | Leon Paul VAN DIJK, Richard Johannes Franciscus Van Haren, Subodh Singh, Ilya MALAKHOVSKY, Amandev Singh | 2022-04-12 |
| 11226567 | Methods and apparatus for use in a device manufacturing method | Richard Johannes Franciscus Van Haren, Leon Paul VAN DIJK, Ilya MALAKHOVSKY, Mahdi SADEGHINIA | 2022-01-18 |