Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198606 | Structure for microelectromechanical systems (MEMS) devices to control pressure at high temperature | Yi-Ren Wang, Yuan-Chih Hsieh | 2021-12-14 |
| 11049763 | Multi-patterning to form vias with straight profiles | Chun-Kai Chen, Jung-Hau Shiu, Chia-Cheng Chou, Chung-Chi Ko, Tze-Liang Lee +1 more | 2021-06-29 |
| 11040870 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Chun-Wen Cheng, Fei-Lung Lai, Yuan-Chih Hsieh, Yi-Ren Wang | 2021-06-22 |
| 11004734 | Metal-based etch-stop layer | Szu-Ping Tung, Yu-Kai Lin, Jen Hung Wang | 2021-05-11 |
| 10978301 | Morphology of resist mask prior to etching | Ching-Yu Chang, Jung-Hau Shiu, Wei-Ren Wang, Tze-Liang Lee | 2021-04-13 |