Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11174158 | MEMS device with dummy-area utilization for pressure enhancement | Chun-Wen Cheng, Kuei-Sung Chang, Shang-Ying Tsai | 2021-11-16 |
| 11148936 | CMOS-MEMS structure and method of forming the same | Jung-Huei Peng, Chia-Hua Chu, Shiang-Chi Lin | 2021-10-19 |
| 11099152 | Backside CMOS compatible BioFET with no plasma induced damage | Yi-Shao Liu, Chun-Ren Cheng, Ching-Ray Chen, Yi-Hsien Chang, Chun-Wen Cheng | 2021-08-24 |
| 11084713 | Bypass structure | Eason Hsieh, Kuei-Sung Chang | 2021-08-10 |
| 11040870 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Chun-Wen Cheng, Shing-Chyang Pan, Yuan-Chih Hsieh, Yi-Ren Wang | 2021-06-22 |
| 11027310 | Fluid deposition apparatus and method | Chun-Wen Cheng, Jung-Huei Peng, Yi-Shao Liu, Shang-Ying Tsai | 2021-06-08 |