Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198606 | Structure for microelectromechanical systems (MEMS) devices to control pressure at high temperature | Shing-Chyang Pan, Yuan-Chih Hsieh | 2021-12-14 |
| 11050012 | Method to protect electrodes from oxidation in a MEMS device | Hung-Hua Lin, Yuan-Chih Hsieh | 2021-06-29 |
| 11040870 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Chun-Wen Cheng, Fei-Lung Lai, Shing-Chyang Pan, Yuan-Chih Hsieh | 2021-06-22 |