Issued Patents 2021
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11206493 | Sensor device and manufacturing method thereof | Chen-Hsiung Yang, Chia-Hua Chu, En-Chan Chen | 2021-12-21 |
| 11186481 | Sensor device and manufacturing method thereof | Chen-Hsiung Yang, Jiou-Kang Lee | 2021-11-30 |
| 11184694 | Integrated microphone device and manufacturing method thereof | Chia-Hua Chu, Chun-Yin Tsai, Tzu-Heng Wu, Wen Cheng Kuo | 2021-11-23 |
| 11180363 | Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same | Kuei-Sung Chang, Tai-Bang An, Hung-Hua Lin | 2021-11-23 |
| 11174158 | MEMS device with dummy-area utilization for pressure enhancement | Fei-Lung Lai, Kuei-Sung Chang, Shang-Ying Tsai | 2021-11-16 |
| 11117796 | MEMS devices including MEMS dies and connectors thereto | Jung-Huei Peng, Shang-Ying Tsai, Hung-Chia Tsai, Yi-Chuan Teng | 2021-09-14 |
| 11099152 | Backside CMOS compatible BioFET with no plasma induced damage | Yi-Shao Liu, Chun-Ren Cheng, Ching-Ray Chen, Yi-Hsien Chang, Fei-Lung Lai | 2021-08-24 |
| 11089408 | MEMS microphone having diaphragm | Chia-Hua Chu, Chun-Yin Tsai | 2021-08-10 |
| 11078074 | Integration scheme for microelectromechanical systems (MEMS) devices and complementary metal-oxide-semiconductor (CMOS) devices | Chia-Hua Chu | 2021-08-03 |
| 11051109 | Dual back-plate and diaphragm microphone | Chia-Hua Chu, Wen-Tuan Lo | 2021-06-29 |
| 11040870 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Fei-Lung Lai, Shing-Chyang Pan, Yuan-Chih Hsieh, Yi-Ren Wang | 2021-06-22 |
| 11027310 | Fluid deposition apparatus and method | Jung-Huei Peng, Yi-Shao Liu, Fei-Lung Lai, Shang-Ying Tsai | 2021-06-08 |
| 11014805 | Method of forming semiconductor package and semiconductor package | Hung-Chia Tsai, Lan-Lin Chao, Yuan-Chih Hsieh, Ping-Yin Liu | 2021-05-25 |
| 10989685 | Method of using biochip with biosensors | Yi-Shao Liu, Chun-Ren Cheng | 2021-04-27 |
| 10968097 | Support structure for MEMS device with particle filter | Chia-Hua Chu, Wen Cheng Kuo | 2021-04-06 |
| 10941034 | Particle filter for MEMS device | Chia-Hua Chu, Wen Cheng Kuo | 2021-03-09 |