Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180363 | Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same | Kuei-Sung Chang, Chun-Wen Cheng, Hung-Hua Lin | 2021-11-23 |