Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11180363 | Outgassing material coated cavity for a micro-electro mechanical system device and methods for forming the same | Tai-Bang An, Chun-Wen Cheng, Hung-Hua Lin | 2021-11-23 |
| 11174158 | MEMS device with dummy-area utilization for pressure enhancement | Chun-Wen Cheng, Fei-Lung Lai, Shang-Ying Tsai | 2021-11-16 |
| 11084713 | Bypass structure | Eason Hsieh, Fei-Lung Lai | 2021-08-10 |
| 11040870 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Chun-Wen Cheng, Fei-Lung Lai, Shing-Chyang Pan, Yuan-Chih Hsieh, Yi-Ren Wang | 2021-06-22 |
| 11018218 | Narrow gap device with parallel releasing structure | Te-Hao Lee | 2021-05-25 |
| 11011601 | Narrow gap device with parallel releasing structure | Te-Hao Lee | 2021-05-18 |
| 10961115 | Semiconductor structure and manufacturing method thereof | — | 2021-03-30 |
| 10889493 | MEMS method and structure | Ting-Hau Wu | 2021-01-12 |