Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069528 | Semiconductor device and method | Ching-Yu Chang, Jen Hung Wang, Tze-Liang Lee | 2021-07-20 |
| 11049763 | Multi-patterning to form vias with straight profiles | Chun-Kai Chen, Chia-Cheng Chou, Chung-Chi Ko, Tze-Liang Lee, Chih-Hao Chen +1 more | 2021-06-29 |
| 10978301 | Morphology of resist mask prior to etching | Ching-Yu Chang, Wei-Ren Wang, Shing-Chyang Pan, Tze-Liang Lee | 2021-04-13 |