Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037766 | Substrate support apparatus and plasma processing apparatus having the same | Kwang-Nam Kim, Sung Yeon Kim, Hyung Jun Kim, Sang Rok Oh, Jung Pyo Hong | 2021-06-15 |
| 11037806 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jung-Mo Sung, Je-Woo Han, Jin Young Park | 2021-06-15 |
| 11018046 | Substrate processing apparatus including edge ring | Sung Moon Park, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Sang Rok Oh +3 more | 2021-04-06 |
| 10964578 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Je-Woo Han, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2021-03-30 |
| 10903053 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Doug Yong Sung, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2021-01-26 |