Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037806 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Seung-Yoon Song, Chan Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Jin Young Park | 2021-06-15 |
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Sung Moon Park, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |
| 10964578 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Chan Hoon Park, Seung-Yoon Song, Seul Ha Myung | 2021-03-30 |
| 10892142 | System for fabricating a semiconductor device | SangJean Jeon, Jinyoung Park, Chanhoon Park, Hoyong Park, Jin-young Bang +2 more | 2021-01-12 |