Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035040 | Showerhead and substrate processing apparatus | Edward Sung, Hyuk-Jin Kim, Sung-Il Cho | 2021-06-15 |
| 10892142 | System for fabricating a semiconductor device | SangJean Jeon, Jinyoung Park, Chanhoon Park, Hoyong Park, JungHwan Um +2 more | 2021-01-12 |