Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127654 | Semiconductor device and a manufacturing method thereof | Kyeong Bin Lim, Sung-Hyup Kim, Hyo Ju Kim, Jeong Min Na | 2021-09-21 |
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Sung Moon Park, Je-Woo Han, Kwang-Nam Kim, Young-hoon Jeong +1 more | 2021-05-25 |