Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037766 | Substrate support apparatus and plasma processing apparatus having the same | Sung Yeon Kim, Hyung Jun Kim, Jong-Woo Sun, Sang Rok Oh, Jung Pyo Hong | 2021-06-15 |
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Sung Moon Park, Je-Woo Han, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun, Sang Rok Oh +3 more | 2021-04-06 |