Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun, Sang Rok Oh +3 more | 2021-04-06 |