Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037766 | Substrate support apparatus and plasma processing apparatus having the same | Kwang-Nam Kim, Sung Yeon Kim, Hyung Jun Kim, Jong-Woo Sun, Jung Pyo Hong | 2021-06-15 |
| 11020118 | Peripheral nerve fixing apparatus | Donghyun Hwang, Keehoon Kim, Yong Seok Ihn, Sehyuk Yim, Jinwoo Jeong +2 more | 2021-06-01 |
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun +3 more | 2021-04-06 |