Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037766 | Substrate support apparatus and plasma processing apparatus having the same | Kwang-Nam Kim, Hyung Jun Kim, Jong-Woo Sun, Sang Rok Oh, Jung Pyo Hong | 2021-06-15 |
SK
Sung Yeon Kim
Overall (2021): #246,768 of 548,734Top 45%
1
Patents 2021