Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018046 | Substrate processing apparatus including edge ring | Jong-Woo Sun, Je-Woo Han, Kwang-Nam Kim, Ho Chang Lee, Young-hoon Jeong +1 more | 2021-05-25 |