Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971343 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2021-04-06 |
| 10964511 | Semiconductor manufacturing device and method of operating the same | Seung Bo Shim, Myung Sun Choi, Nam Jun KANG, Sang Min Jeong, Peter Byung H Han | 2021-03-30 |
| 10903053 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2021-01-26 |