Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971343 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Sung Ho JANG +1 more | 2021-04-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971343 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Sung Ho JANG +1 more | 2021-04-06 |