Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971343 | Apparatus for monitoring process chamber | Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971343 | Apparatus for monitoring process chamber | Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2021-04-06 |