Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971333 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Je-Hun WOO, Bongseong KIM, Juho Lee +1 more | 2021-04-06 |
| 10971343 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn +1 more | 2021-04-06 |
| 10903053 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Doug Yong Sung, Yong-Ho Lim +1 more | 2021-01-26 |
| 10896838 | Electrostatic chucks and substrate processing apparatus including the same | Minsung Kim, Myoung Soo Park, Dougyong Sung | 2021-01-19 |