Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971333 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Je-Hun WOO, Juho Lee, Yun-Kwang Jeon +1 more | 2021-04-06 |