| 11075088 |
Method of plasma etching and method of fabricating semiconductor device using the same |
Hoyong Park, Namjun Kang, Seungbo Shim, Junghyun Cho, Myungsun Choi |
2021-07-27 |
| 11075089 |
Method of plasma etching and method of fabricating semiconductor device using the same |
Hoyong Park, Namjun Kang, Seungbo Shim, Junghyun Cho, Myungsun Choi |
2021-07-27 |
| 10971333 |
Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same |
Dong-Hyub Lee, Je-Hun WOO, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more |
2021-04-06 |
| 10934621 |
Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same |
Minkyu SUNG, Sung-Ki Lee, Sang Ho Lee, Kangmin Jeon |
2021-03-02 |
| 10896838 |
Electrostatic chucks and substrate processing apparatus including the same |
Minsung Kim, Myoung Soo Park, Yun-Kwang Jeon |
2021-01-19 |
| 10892145 |
Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same |
Sejin OH, Kyohyeok Kim, Jongwoo Sun, Sung-Ki Lee, Jaehyun Lee |
2021-01-12 |
