Jongwoo Sun — 3 Patents at Samsung

Issued Patents 2021

Showing 1–3 of 3 patents

Patent #	Title	Co-Inventors	Date
11092495	Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device	Jeongil Mun, Hyung Joo Lee	2021-08-17
10935429	Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method	Kyeonghun Kim, Jeongil Mun, Hyung Joo Lee	2021-03-02
10892145	Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same	Sejin OH, Kyohyeok Kim, Dougyong Sung, Sung-Ki Lee, Jaehyun Lee	2021-01-12