Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10935429 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Jeongil Mun, Hyung Joo Lee, Jongwoo Sun | 2021-03-02 |
KK
Kyeonghun Kim
Overall (2021): #366,599 of 548,734Top 70%
1
Patents 2021