Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092495 | Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device | Hyung Joo Lee, Jongwoo Sun | 2021-08-17 |
| 10935429 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Kyeonghun Kim, Hyung Joo Lee, Jongwoo Sun | 2021-03-02 |