Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10934621 | Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the same | Sung-Ki Lee, Dougyong Sung, Sang Ho Lee, Kangmin Jeon | 2021-03-02 |