Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075088 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Dougyong Sung, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2021-07-27 |
| 11075089 | Method of plasma etching and method of fabricating semiconductor device using the same | Hoyong Park, Dougyong Sung, Seungbo Shim, Junghyun Cho, Myungsun Choi | 2021-07-27 |