Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037760 | Temperature controller, temperature measurer, and plasma processing apparatus including the same | Bi-Ah Shin, Bo-Ra Yoon, Jun-Ho Im | 2021-06-15 |
| 10903053 | Plasma processing apparatus | Jung Pyo Hong, Jong-Woo Sun, Doug Yong Sung, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2021-01-26 |