Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037760 | Temperature controller, temperature measurer, and plasma processing apparatus including the same | Hak-young KIM, Bi-Ah Shin, Jun-Ho Im | 2021-06-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037760 | Temperature controller, temperature measurer, and plasma processing apparatus including the same | Hak-young KIM, Bi-Ah Shin, Jun-Ho Im | 2021-06-15 |