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Home › 2021 › Mattson Technology › Michael X. Yang

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Michael X. Yang — 13 Patents in 2021

BCBeijing E-Town Semiconductor Technology Co.: 12 patents #2 of 39Top 6%

MTMattson Technology: 12 patents #2 of 39Top 6%

Palo Alto, CA: #25 of 2,152 inventorsTop 2%

California: #733 of 66,859 inventorsTop 2%

Overall (2021): #4,656 of 548,734Top 1%

13 Patents 2021

Issued Patents 2021

Showing 1–13 of 13 patents

Patent #	Title	Co-Inventors	Date
11195718	Spacer open process by dual plasma	Tsai Wen Sung, Chun Yan, Hua Chung, Dixit V. Desai, Peter J. Lembesis	2021-12-07
11193178	Thermal processing of closed shape workpieces	Rolf Bremensdorfer, Johannes Keppler	2021-12-07
11183397	Selective etch process using hydrofluoric acid and ozone gases	Qi Zhang, Haichun Yang, Hua Chung, Ting Xie	2021-11-23
11164725	Generation of hydrogen reactive species for processing of workpieces	Qi Zhang, Xinliang Lu, Hua Chung	2021-11-02
11164742	Selective deposition using methylation treatment	Hua Chung, Xinliang Lu	2021-11-02
11164727	Processing of workpieces using hydrogen radicals and ozone gas	Ting Xie, Hua Chung, Bin Dong, Xinliang Lu, Haichun Yang	2021-11-02
11094528	Surface treatment of substrates using passivation layers	Tongchuan Gao, Grigoriy Kishko, Vijay M. Vaniapura	2021-08-17
11087409	Systems and methods for generating accurate transaction data and manipulation	Sam Bobley	2021-08-10
11062910	Surface treatment of silicon or silicon germanium surfaces using organic radicals	Hua Chung, Xinliang Lu	2021-07-13
11043393	Ozone treatment for selective silicon nitride etch over silicon	Shanyu Wang, Ting Xie, Chun Yan, Xinliang Lu, Hua Chung	2021-06-22
10964528	Integration of materials removal and surface treatment in semiconductor device fabrication	Hua Chung, Xinliang Lu, Haochen Li, Ting Xie, Qi Zhang	2021-03-30
10950428	Method for processing a workpiece	Ting Xie, Hua Chung, Xinliang Lu, Shawming Ma	2021-03-16
10910228	Surface treatment of carbon containing films using organic radicals	Hua Chung, Xinliang Lu	2021-02-02