Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201036 | Plasma strip tool with uniformity control | Vladimir Nagorny, Dixit V. Desai, Ryan Pakulski | 2021-12-14 |
| 11189464 | Variable mode plasma chamber utilizing tunable plasma potential | Stephen E. Savas | 2021-11-30 |
| 11062912 | Atomic layer etch process using plasma in conjunction with a rapid thermal activation process | — | 2021-07-13 |
| 11049692 | Methods for tuning plasma potential using variable mode plasma chamber | Stephen E. Savas | 2021-06-29 |
| 11039527 | Air leak detection in plasma processing apparatus with separation grid | Shuang Meng, Xinliang Lu, Hua Chung | 2021-06-15 |
| 10950428 | Method for processing a workpiece | Ting Xie, Hua Chung, Xinliang Lu, Michael X. Yang | 2021-03-16 |
| 10901321 | Strip process for high aspect ratio structure | Vijay M. Vaniapura, Li Hou | 2021-01-26 |