Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11201036 | Plasma strip tool with uniformity control | Shawming Ma, Vladimir Nagorny, Ryan Pakulski | 2021-12-14 |
| 11195718 | Spacer open process by dual plasma | Tsai Wen Sung, Chun Yan, Hua Chung, Michael X. Yang, Peter J. Lembesis | 2021-12-07 |