Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189464 | Variable mode plasma chamber utilizing tunable plasma potential | Shawming Ma | 2021-11-30 |
| 11049692 | Methods for tuning plasma potential using variable mode plasma chamber | Shawming Ma | 2021-06-29 |