Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107693 | Method for high aspect ratio photoresist removal in pure reducing plasma | Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris +2 more | 2021-08-31 |
| 11094528 | Surface treatment of substrates using passivation layers | Tongchuan Gao, Grigoriy Kishko, Michael X. Yang | 2021-08-17 |
| 10901321 | Strip process for high aspect ratio structure | Shawming Ma, Li Hou | 2021-01-26 |