Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964528 | Integration of materials removal and surface treatment in semiconductor device fabrication | Michael X. Yang, Hua Chung, Xinliang Lu, Ting Xie, Qi Zhang | 2021-03-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964528 | Integration of materials removal and surface treatment in semiconductor device fabrication | Michael X. Yang, Hua Chung, Xinliang Lu, Ting Xie, Qi Zhang | 2021-03-30 |