Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ozone treatment for selective silicon nitride etch over silicon

Ozone treatment for selective silicon nitride etch over silicon

US Patent 11043393 · Granted Jun 22, 2021

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Translation method and electronic device2025
Systems and methods for thermal processing and temperature measurement of a work2025
Transmission-based temperature measurement of a workpiece in a thermal processin2025
Nucleation-free gap fill ALD process2025
Hybrid computing system management2025
Thermophilic recombinant type II pullulanase and application thereof2025
Metasurface-based imaging system, design method, and detector2025
Method and apparatus for low temperature selective epitaxy in a deep trench2025
Ultra-wide angle broadband polarization imaging system based on metasurface, and2025
Workpiece processing apparatus with thermal processing systems2024
Control system for adaptive control of a thermal processing system2024
Arc lamp with forming gas for thermal processing systems2024