Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204239 | Metrology method, target and substrate | Kaustuve Bhattacharyya, Henricus Wilhelmus Maria Van Buel, Christophe David Fouquet, Hendrik Jan Hidde Smilde, Maurits Van Der Schaar +7 more | 2021-12-21 |
| 11187995 | Metrology using a plurality of metrology target measurement recipes | Victor Emanuel Calado, Youping Zhang, Maurits Van Der Schaar, Richard Johannes Franciscus Van Haren | 2021-11-30 |
| 11156923 | Lithographic method and lithographic apparatus | Hakki Ergün Cekli, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren | 2021-10-26 |
| 10990018 | Computational metrology | Wim Tjibbo Tel, Bart Peter Bert Segers, Everhardus Cornelis Mos, Emil Peter Schmitt-Weaver, Yichen Zhang +4 more | 2021-04-27 |