Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199505 | Machine learning enhanced optical-based screening for in-line wafer testing | Mary Breton, Huai Huang, Dexin Kong, Lawrence A. Clevenger | 2021-12-14 |
| 11079337 | Secure wafer inspection and identification | Fee Li Lie, Effendi Leobandung, Richard C. Johnson, Scott D. Halle | 2021-08-03 |
| 11081567 | Replacement-channel fabrication of III-V nanosheet devices | Jingyun Zhang, Choonghyun Lee, Chun Wing Yeung, Heng Wu | 2021-08-03 |
| 10985273 | Vertical field-effect transistor including a fin having sidewalls with a tapered bottom profile | Chun Wing Yeung, Choonghyun Lee, Jingyun Zhang, Heng Wu | 2021-04-20 |
| 10978576 | Techniques for vertical FET gate length control | Chi-Chun Liu, Chun Wing Yeung, Zhenxing Bi, Kristin Schmidt, Yann Mignot | 2021-04-13 |
| 10955359 | Method for quantification of process non uniformity using model-based metrology | Yunlin Zhang | 2021-03-23 |
| 10930793 | Bottom channel isolation in nanosheet transistors | Choonghyun Lee, Chun Wing Yeung, Jingyun Zhang | 2021-02-23 |
| 10903315 | Formation of dielectric layer as etch-stop for source and drain epitaxy disconnection | Nicolas Loubet, Julien Frougier, Ruilong Xie | 2021-01-26 |