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Method for determining a control parameter for an apparatus utilized in a semiconductor manufacturing process |
Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin |
2021-11-23 |
| 11175591 |
Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus |
Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara, Rizvi Rahman +3 more |
2021-11-16 |
| 11156923 |
Lithographic method and lithographic apparatus |
Xing Lan Liu, Stefan Cornelis Theodorus Van Der Sanden, Richard Johannes Franciscus Van Haren |
2021-10-26 |
| 11099485 |
Maintaining a set of process fingerprints |
Alexander Ypma, Vahid BASTANI, Dag Sonntag, Jelle Nije, Georgios TSIROGIANNIS +1 more |
2021-08-24 |
| 11086229 |
Method to predict yield of a device manufacturing process |
Alexander Ypma, Cyrus E. Tabery, Simon Hendrik Celine Van Gorp, Chenxi Lin, Dag Sonntag +9 more |
2021-08-10 |
| 11036148 |
Patterning device cooling system and method of thermally conditioning a patterning device |
Güneş Nakibo{hacek over (g)}lu, Frank Johannes Jacobus Van Boxtel, Jean-Philippe Xavier Van Damme, Richard Johannes Franciscus Van Haren |
2021-06-15 |
| 11036146 |
Method and apparatus to reduce effects of nonlinear behavior |
Richard Johannes Franciscus Van Haren, Everhardus Cornelis Mos, Peter Ten Berge, Peter Hanzen Wardenier, Erik Weber Jensen |
2021-06-15 |
| 11029610 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees +11 more |
2021-06-08 |
| 10962887 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more |
2021-03-30 |