Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985023 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, Mei Chang +1 more | 2021-04-20 |
| 10950433 | Methods for enhancing selectivity in SAM-based selective deposition | Chang Ke, Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang +3 more | 2021-03-16 |
| 10943780 | Methods for ALD of metal oxides on metal surfaces | Bhaskar Jyoti Bhuyan, Mark Saly, Li-Qun Xia | 2021-03-09 |