Issued Patents 2021
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903337 | Air gap spacer with wrap-around etch stop layer under gate spacer | Chen Zhang, Kangguo Cheng, Xin Miao, Wenyu Xu | 2021-01-26 |
| 10896854 | Forming fins utilizing alternating pattern of spacers | Kangguo Cheng | 2021-01-19 |
| 10890560 | Forming nanoscale pores in a semiconductor structure utilizing nanotubes as a sacrificial template | Juntao Li, Kangguo Cheng, Zhenxing Bi | 2021-01-12 |
| 10892325 | Vertical field effect transistor with reduced gate to source/drain capacitance | Juntao Li, Kangguo Cheng, Choonghyun Lee | 2021-01-12 |
| 10892324 | Vertical field effect transistor with reduced gate to source/drain capacitance | Juntao Li, Kangguo Cheng, Choonghyun Lee | 2021-01-12 |
| 10886169 | Airgap formation in BEOL interconnect structure using sidewall image transfer | Kangguo Cheng, Ekmini Anuja De Silva, Juntao Li, Yi Song | 2021-01-05 |