Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825663 | Plasma processing apparatus | Kazuya Nagaseki, Mitsunori Ohata | 2020-11-03 |
| 10699935 | Semiconductor manufacturing device and processing method | Yoshiyuki Kobayashi, Takehiro Kato, Etsuji Ito | 2020-06-30 |
| 10651012 | Substrate processing method | Akihiro Yokota, Etsuji Ito | 2020-05-12 |
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Tatsuro Ohshita, Takashi Dokan, Koji Maruyama +1 more | 2020-02-04 |