Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2020-02-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553407 | Plasma processing method and plasma processing apparatus | Koichi Nagami, Kazunobu Fujiwara, Takashi Dokan, Koji Maruyama, Kazuya Nagaseki +1 more | 2020-02-04 |